Comparison ledger
Zeiss Axioscope 5 and Zeiss sem2, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Axioscope 5Zeiss | sem2Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axioscope | Zeiss sem2 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 100-240V[4] | — |
| Transmitted light illumination | 10W LED or Halogen 50W[3] | — |
| Fluorescence light illumination | Colibri 3, Viluma 5/7, HXP 120[3] | — |
| Objective magnifications available | 5X, 10X, 20X, 50X, 100X[5] | — |
| Transmitted light power source | 100-240V, 50/60 Hz, 120VA[4] | — |
| Field of view (with ergophototube) | 23 mm or 25 mm[6] | — |
| Z focus | Manual[3] | — |
| Recommended software | Labscope, ZEN[3] | — |
| Recommended cameras | Color: Axiocam 208 color, Axiocam 212 color, Axiocam 305 color; Monochrome: Axiocam 202 mono, Axiocam 203 mono, Axiocam 305 mono[3] | — |
| OEM | — | Zeiss[7] |
| Model | — | sem2[7] |
| Equipment name | — | Zeiss 200 mm Scanning Electron Microscope[7] |
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