Comparison ledger
Zeiss Gemini560 and Zeiss LEO 1560, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Gemini560Zeiss | LEO 1560Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 6” wafer loading through the loadlock is possible |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Gemini560 | Zeiss LEO |
| Specifications | ||
| equipment type | SEM[1] | — |
| Configuration | — | 6" stage and loadlock[2] |
| Wafer size | — | 6” wafer loading through the loadlock is possible[2] |
| Known issues | — | Some Flickering on image of chamber scope[3] |
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