Waferpedia

Zeiss

LEO 1560

Metrology & Inspection6” wafer loading through the loadlock is possibleZeiss LEO family
Research Quality: 30% complete
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LEO 1560 — Inventory photo
Fig. 01LEO 1560Inventory photo[1]

  • Plate 01Used ZEISS scanning electron microscope LEO 1560

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Wafer size

6” wafer loading through the loadlock is possible

Optics

In-lens SE & E-T SE detectors[1]

What is it?

The Zeiss LEO 1560 is a scanning electron microscope with a 6-inch stage and loadlock, Schottky field emission gun, and in-lens SE and E-T SE detectors.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Some flickering on image of chamber scope

What do the numbers mean?

Wafer handling9

6" stage and loadlock[1]
Accurate?
Wafer size
6” wafer loading through the loadlock is possible[1]
Accurate?
Field 6” loadlock and stage[1]
Accurate?
Wafer size
4" max wafer diameter loading with the load lock[1]
Accurate?
Wafer size
Comes with a variety of sample and wafer holders[1]
Accurate?
Wafer size
6" stage and loadlock. 6” wafer loading thru the loadlock is possible[2]
Accurate?
Fjeld 6” loadlock and stage[2]
Accurate?
Wafer size
4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door[2]
Accurate?
Wafer size
Includes a variety of sample and wafer holders[2]
Accurate?

Optics & imaging2

In-lens SE & E-T SE detectors[1]
Accurate?
Capable of 1nm resolution at 20kV[1]
Accurate?

Control & software1

Upgraded with integrated Current monitor on stage, readable in software[1]
Accurate?

Configuration & options7

Schottky field emission gun[1]
Accurate?
6'' max loading through the chamber door[1]
Accurate?
Upgraded to uniplinth[1]
Accurate?
Runs Smartsem v5[1]
Accurate?
Some Flickering on image of chamberscope[1]
Accurate?
Upgraded to uniplinth. Runs Smartsem v5[2]
Accurate?
Known issues
Some Flickering on image of chamber scope[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the LEO 1560 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LEO 1560 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the LEO 1560 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the LEO 1560 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the LEO 1560 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the LEO 1560 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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