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Comparison ledger

Leo 1530 FE-SEM versus O Inspect 322 CMM

Zeiss Leo 1530 FE-SEM and Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Leo 1530 FE-SEMZeiss
O Inspect 322 CMMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss LEOZeiss O Inspect 322 CMM
Cited variants—
  • O-INSPECT 3 / 2 / 2[1]
Specifications
ConfigurationFour-Quadrant Backscattered Electron Detector (4QBSD)[2]Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[3]
OXFORD 6901 EDX Detector with resolution133 eV at 5.9 KeV[2]—
Determination area10 mm²[2]—
P/N—636520-9932-000[1]
Leo 1530 FE-SEM entryO Inspect 322 CMM entry

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing