Comparison ledger
Zeiss Leo 1530 FE-SEM, Zeiss sem2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Leo 1530 FE-SEMZeiss | sem2Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss sem2 |
| Specifications | ||
| Configuration | Four-Quadrant Backscattered Electron Detector (4QBSD)[1] | — |
| OXFORD 6901 EDX Detector with resolution | 133 eV at 5.9 KeV[1] | — |
| Determination area | 10 mm²[1] | — |
| Detectors | Four-Quadrant Backscattered Electron Detector (4QBSD), E-T Detector, In-lens detector[1] | — |
| EDX Detector | OXFORD 6901 EDX Detector with resolution 133 eV at 5.9 KeV, determination area 10 mm²[1] | — |
| Resolution | Sub-nanometer[2] | — |
| Voltage Range | 0.2-30 kV[2] | — |
| Maximum Substrate Size | 6 inch[2] | — |
| Stage | Motorized x/y/z axes[2] | — |
| OEM | — | Zeiss[3] |
| Model | — | sem2[3] |
| Equipment name | — | Zeiss 200 mm Scanning Electron Microscope[3] |
| Category | — | Metrology & Inspection[3] |
| Equipment type | — | Scanning Electron Microscope[3] |
| Wafer size | — | 200 mm[3] |
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