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Comparison ledger

Leo 1530 FE-SEM versus Supra 55

Zeiss Leo 1530 FE-SEM and Zeiss Supra 55, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Leo 1530 FE-SEMZeiss
Supra 55Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss LEOZeiss Supra 55
Cited variants—
  • Supra 55 VP[1]
  • Supra 55 FESEM[2]
Specifications
ConfigurationFour-Quadrant Backscattered Electron Detector (4QBSD)[3]Detectors:[4]
OXFORD 6901 EDX Detector with resolution133 eV at 5.9 KeV[3]—
Determination area10 mm²[3]—
Leo 1530 FE-SEM entrySupra 55 entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu
  3. [3]inventory listing
  4. [4]inventory listing