Zeiss
Supra 55
The Zeiss Supra 55 is a field-emission scanning electron microscope (FE-SEM) that uses a Schottky thermal field emission source to achieve high-resolution imaging. The Supra 55 provides an ultimate imaging resolution in the range of 2 nm and an accelerating voltage range of 0.2 to 30 kV.[1][2]
Plate 01Zeiss Supra 55 Training Video Part 1 Review
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What it is
The Zeiss Supra 55 is a scanning electron microscope used for metrology and inspection. The Zeiss Supra 55 belongs to the field-emission SEM class and is used for high-resolution surface imaging and characterization.[1][2][4][5]
How it works
The Zeiss Supra 55 uses multiple detectors for secondary-electron and backscatter signals. The Zeiss Supra 55 can also support cathodoluminescence detection and electron-beam-lithography-related use when configured for those functions.[2][1]
The Zeiss Supra 55 VP operates in high vacuum and variable-pressure modes. The Zeiss Supra 55 VP includes a load-lock system for specimen exchange without venting the main chamber.[4][5]
Where it fits in the process flow
Applications
The Zeiss Supra 55 is used for high-resolution imaging of surface topography. The Zeiss Supra 55 is used for secondary-electron imaging, backscatter imaging, and composition-sensitive contrast when fitted with the relevant detectors.[2][1]
The Zeiss Supra 55 is used for materials characterization. The Zeiss Supra 55 is also used for nanomanipulation and force measurement in setups that include those accessories.[2]
The Zeiss Supra 55 VP is used for samples with a wide range of conductivity. The Zeiss Supra 55 VP is used for solid-sample compositional analysis when equipped with energy-dispersive spectroscopy.[5][4]
What do the numbers mean?
Power & electrical3
Vacuum & pumping10
Optics & imaging9
Control & software2
- PC[3]
Configuration & options23
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Supra 55 VP | — | — | Variable-pressure version; sources state high-vacuum and VP modes, with a load-lock system on one source and VP capability up to 1.33 mbar on another. | bu.edu[5] |
| Supra 55 FESEM | — | — | Described as a FESEM with a Schottky thermal field emission source. | cmdis.rpi.edu[1] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Thermo Fisher Scientific FEI Quanta 450 FEG— Same function class: Metrology & Inspection, nullCompare in depthsource[6]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationAdixen rough pump (for airlock)[3]
- ConfigurationEdwards RV12 Oil Rough pump (Chamber)[3]
- Accelerating Voltage0.2 to 30 kV[2]
- Accelerating Voltage (VP variant)0.1 to 30 kV[4]
- Imaging Resolution (High Vacuum, 15 kV)1.0 nm[4]
- Imaging Resolution (High Vacuum, 1 kV)1.7 nm[4]
- Imaging Resolution (High Vacuum, 0.2 kV)3.5 nm[4]
- Variable Pressure Range2 to 133 Pa, adjustable in steps of 1 Pa[4]
- PumpsAdixen rough pump (airlock), Edwards RV12 oil rough pump (chamber)[3]
- Variable pressure range2 - 133 Pa, adjustable in steps of 1 Pa[4]
- Acceleration voltage0.1 - 30 kV[4]
- AccessoryAdixen rough pump (for airlock)[3]
- AccessoryEdwards RV12 Oil Rough pump (Chamber)[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Supra 55 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Supra 55 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Supra 55 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Supra 55 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Supra 55 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Supra 55 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]cmdis.rpi.edu — cmdis.rpi.educmdis.rpi.edu
- [2]weizmann.ac.il — weizmann.ac.ilweizmann.ac.il
- [3]Inventory photo
- [4]binghamton.edu — binghamton.edubinghamton.edu
- [5]bu.edu — bu.edubu.edu
- [6]Equipment inventory listing
- [7]BEEM: Zeiss Supra 55 VP — tuhh.detuhh.de
Last updated Oct 10, 2026.
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