Waferpedia

Comparison ledger

Leo 1550 versus sem2

Zeiss Leo 1550 and Zeiss sem2, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
sem2Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss LEOZeiss sem2
Specifications
ConfigurationNeeds a pump[1]
OEMZeiss[2]
Modelsem2[2]
Equipment nameZeiss 200 mm Scanning Electron Microscope[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanolab.berkeley.edunanolab.berkeley.edu