Comparison ledger
Zeiss LEO 1560 and Zeiss Sigma 300 VP FE-SEM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LEO 1560Zeiss | Sigma 300 VP FE-SEMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 6” wafer loading through the loadlock is possible | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss Sigma |
| Specifications | ||
| Configuration | 6" stage and loadlock[1] | 50/60 Hz[3] |
| Wafer size | 6” wafer loading through the loadlock is possible[1] | — |
| Known issues | Some Flickering on image of chamber scope[2] | — |
| 1/N/PE | — | 230 Vac[3] |
| 2/PE | — | 208 Vac[3] |
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