Comparison ledger
Zeiss LEO 1560 and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LEO 1560Zeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 6” wafer loading through the loadlock is possible | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss Supra 55 |
| Specifications | ||
| Configuration | 6" stage and loadlock[1] | Variable pressure[3] |
| Wafer size | 6” wafer loading through the loadlock is possible[1] | — |
| Known issues | Some Flickering on image of chamber scope[2] | — |
| Windows OS | — | W10[3] |
| Software | — | SmartSEM (v6)[3] |
| Source Type | — | TFE[3] |
| Primary pump | — | turbo[3] |
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