Comparison ledger
Zeiss Merlin and Zeiss Sigma HDVP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MerlinZeiss | Sigma HDVPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Merlin | Zeiss Sigma |
| Specifications | ||
| Instrument type | Scanning electron microscope (SEM)[1] | — |
| Column | GEMINI II[1] | — |
| Stage | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[1] | — |
| Loadlock | Semi-automatic airlock[1] | — |
| Control software | ZeissSmartSEM[1] | — |
| Available holders | mono samples, cleaved samples, and full 4 inch wafer[1] | — |
| Detectors | In-Lens, HE-SE2, EsB, and EDX detector[1] | — |
| Acceleration voltage | — | 0.02 kV - 30 kV[2] |
| Magnification range | — | 10-1.000.000x[2] |
| Configuration | — | Electron source[2] |
| Specimen chamber | — | 358 mm[2] |
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