Comparison ledger
Zeiss Merlin and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MerlinZeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Merlin | Zeiss Supra 55 |
| Specifications | ||
| Instrument type | Scanning electron microscope (SEM)[1] | — |
| Column | GEMINI II[1] | — |
| Stage | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[1] | — |
| Loadlock | Semi-automatic airlock[1] | — |
| Control software | ZeissSmartSEM[1] | — |
| Available holders | mono samples, cleaved samples, and full 4 inch wafer[1] | — |
| Detectors | In-Lens, HE-SE2, EsB, and EDX detector[1] | — |
| Windows OS | — | W10[2] |
| Software | — | SmartSEM (v6)[2] |
| Source Type | — | TFE[2] |
| Configuration | — | Variable pressure[2] |
| Primary pump | — | turbo[2] |
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