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Comparison ledger

O Inspect 322 CMM versus Sigma 300 VP FE-SEM

Zeiss O Inspect 322 CMM and Zeiss Sigma 300 VP FE-SEM, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
O Inspect 322 CMMZeiss
Sigma 300 VP FE-SEMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss O Inspect 322 CMMZeiss Sigma
Cited variants
  • O-INSPECT 3 / 2 / 2[1]
—
Specifications
ConfigurationMeasuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2]50/60 Hz[3]
P/N636520-9932-000[1]—
1/N/PE—230 Vac[3]
2/PE—208 Vac[3]
O Inspect 322 CMM entrySigma 300 VP FE-SEM entry

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing