Waferpedia

Comparison ledger

O Inspect 322 CMM versus Sigma HDVP

Zeiss O Inspect 322 CMM and Zeiss Sigma HDVP, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
O Inspect 322 CMMZeiss
Sigma HDVPZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss O Inspect 322 CMMZeiss Sigma
Cited variants
  • O-INSPECT 3 / 2 / 2[1]
—
Specifications
ConfigurationMeasuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2]Electron source[3]
P/N636520-9932-000[1]—
Acceleration voltage—0.02 kV - 30 kV[3]
Magnification range—10-1.000.000x[3]
Specimen chamber—358 mm[3]
O Inspect 322 CMM entrySigma HDVP entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing