Comparison ledger
Zeiss O Inspect 322 CMM and Zeiss Supra 40 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | O Inspect 322 CMMZeiss | Supra 40 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss O Inspect 322 CMM | Zeiss Supra 40 VP |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2] | Coolstage (never used)[3] |
| P/N | 636520-9932-000[1] | — |
| Lowest Coolstage Temp | — | -50 C Deg[3] |
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