Comparison ledger
Zeiss O Inspect 322 CMM and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | O Inspect 322 CMMZeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss O Inspect 322 CMM | Zeiss Supra 55 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2] | Variable pressure[3] |
| P/N | 636520-9932-000[1] | — |
| Windows OS | — | W10[3] |
| Software | — | SmartSEM (v6)[3] |
| Source Type | — | TFE[3] |
| Primary pump | — | turbo[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →