Waferpedia

Comparison ledger

sem2 versus Sigma 300 VP FE-SEM

Zeiss sem2 and Zeiss Sigma 300 VP FE-SEM, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
sem2Zeiss
Sigma 300 VP FE-SEMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss sem2Zeiss Sigma
Specifications
OEMZeiss[1]—
Modelsem2[1]—
Equipment nameZeiss 200 mm Scanning Electron Microscope[1]—
Configuration—50/60 Hz[2]
1/N/PE—230 Vac[2]
2/PE—208 Vac[2]
sem2 entrySigma 300 VP FE-SEM entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]inventory listing