Waferpedia

Comparison ledger

sem2 versus Supra 55 VP

Zeiss sem2 and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
sem2Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss sem2Zeiss Supra 55
Specifications
OEMZeiss[1]
Modelsem2[1]
Equipment nameZeiss 200 mm Scanning Electron Microscope[1]
Windows OSW10[2]
SoftwareSmartSEM (v6)[2]
Source TypeTFE[2]
ConfigurationVariable pressure[2]
Primary pumpturbo[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]inventory listing