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Sigma 300 VP FE-SEM versus UEM

Zeiss Sigma 300 VP FE-SEM and Zeiss UEM, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Sigma 300 VP FE-SEMZeiss
UEMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss SigmaZeiss UEM
Specifications
Configuration50/60 Hz[1]Brightfield[2]
1/N/PE230 Vac[1]—
2/PE208 Vac[1]—
Illumination Type—Reflected Light[2]
Binocular Angle—45°[2]
Magnification—8X[2]
Magnification Changer—1.25X, 1.6X, 2X[2]
Illumination Power—12 V, 60 watts[2]
Power Supply included—YES[2]
Stage Type—Coaxial X-Y[2]
Length—273 mm (10.78 in)[2]
Width—356 mm (14.016 in)[2]
Sigma 300 VP FE-SEM entryUEM entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing