Waferpedia

Zeiss

UEM

Metrology & InspectionZeiss UEM family
Research Quality: 30% complete
UEM — Inventory photo
Fig. 01UEMInventory photo[1]

Power

12 V, 60 watts[1]

Optics

Reflected Light[1]

What is it?

The Zeiss UEM is a brightfield microscope with reflected-light illumination, binocular viewing at 45°, and a coaxial X-Y stage.

What do the numbers mean?

Power & electrical2

Illumination Power
12 V, 60 watts[1]
Accurate?
Power Supply included
YES[1]
Accurate?

Optics & imaging4

Illumination Type
Reflected Light[1]
Accurate?
Magnification
8X[1]
Accurate?
Magnification Changer
1.25X, 1.6X, 2X[1]
Accurate?
Multiple Objectives Models:[1]
Accurate?

Dimensions & facilities1

Width
356 mm (14.016 in)[1]
Accurate?

Configuration & options13

Brightfield[1]
Accurate?
Binocular Angle
45°[1]
Accurate?
KPL Eye Piece[1]
Accurate?
Stage Type
Coaxial X-Y[1]
Accurate?
Stage Area:[1]
Accurate?
Length
273 mm (10.78 in)[1]
Accurate?
X-Y-Z Stage Travel:[1]
Accurate?
X: 152 mm (5.984 in)[1]
Accurate?
Y: 152 mm (5.984 in)[1]
Accurate?
Epiplan 4X 0.1[1]
Accurate?
Epiplan 8X 0.2[1]
Accurate?
Epiplan 16X 0.35[1]
Accurate?
Epiplan 40X 0.85[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Illumination Power12 V, 60 watts[1]
  • Power Supply includedYES[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the UEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UEM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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