Waferpedia

Comparison ledger

Supra 40 VP versus Supra 55

Zeiss Supra 40 VP and Zeiss Supra 55, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Supra 40 VPZeiss
Supra 55Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss Supra 40 VPZeiss Supra 55
Cited variants—
  • Supra 55 VP[1]
  • Supra 55 FESEM[2]
Specifications
ConfigurationCoolstage (never used)[3]Detectors:[4]
Lowest Coolstage Temp-50 C Deg[3]—
Supra 40 VP entrySupra 55 entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu
  3. [3]inventory listing
  4. [4]inventory listing