Comparison ledger
Zeiss Supra 55 and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Supra 55Zeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Supra 55 | Zeiss Supra 55 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Detectors:[3] | Variable pressure[4] |
| Windows OS | — | W10[4] |
| Software | — | SmartSEM (v6)[4] |
| Source Type | — | TFE[4] |
| Primary pump | — | turbo[4] |
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