Waferpedia

Comparison ledger

Supra 55 versus Supra 55 VP

Zeiss Supra 55 and Zeiss Supra 55 VP, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss Supra 55Zeiss Supra 55
Cited variants
  • Supra 55 VP[1]
  • Supra 55 FESEM[2]
Specifications
ConfigurationDetectors:[3]Variable pressure[4]
Windows OSW10[4]
SoftwareSmartSEM (v6)[4]
Source TypeTFE[4]
Primary pumpturbo[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu
  3. [3]inventory listing
  4. [4]inventory listing