Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, ADE AFS-3220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | AFS-3220ADE |
|---|---|---|
| OEM | Accretech | ADE |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | ADE AFS-3220 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | 300mm[2] |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Manufacturer | — | ADE[2] |
| Model | — | AFS-3220[2] |
| Equipment type | — | Wafer Characterization Metrology Equipment[2] |
| Configured wafer size | — | 300mm[2] |
| OEM manufacturing date | — | 2002[2] |
| Install date | — | 2002[2] |
| Date of last PM | — | 2017/4/13[2] |
| System status | — | Off-Line[2] |
| Handler type | — | BROOKS[2] |
| Robot type | — | BROOKS[2] |
| End-effector type | — | BROOKS[2] |
| Pre-aligner | — | Mini-Environment[2] |
| Control system | — | Windows NT[2] |