ADE

AFS-3220

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

ADE AFS-3220 is wafer characterization metrology equipment. ADE AFS-3220 is currently configured for 300mm wafers. ADE AFS-3220 has an OEM manufacturing date of 2002.^[1]

ADEAFS-3220

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What it is

The ADE AFS-3220 is wafer characterization metrology equipment. The ADE AFS-3220 is currently configured for 300 mm wafers. The ADE AFS-3220 uses a Brooks handler, Brooks robot, Brooks end effector, and Brooks pre-aligner. The ADE AFS-3220 runs on Windows NT.^[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Asset HDD not included
Missing or Damaged Parts

What do the numbers mean?

Wafer handling6

Wafer size: Wafer Equipment^[1]
Wafer size: Wafer Characterization^[1]
Equipment type: Wafer Characterization Metrology Equipment^[1]
Configured wafer size: 300mm^[1]
Handler type: BROOKS^[1]
Robot type: BROOKS^[1]

Control & software1

Control system: Windows NT^[1]

Configuration & options9

Currently Configured for: 300mm^[1]
Manufacturer: ADE^[1]
Model: AFS-3220^[1]
OEM manufacturing date: 2002^[1]
Install date: 2002^[1]
Date of last PM: 2017/4/13^[1]
System status: Off-Line^[1]
End-effector type: BROOKS^[1]
Pre-aligner: Mini-Environment^[1]

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed^[1]

Asset HDD not included
Handler Type is BROOKS
Robot Type is BROOKS
300mm
End-Effecter Type is BROOKS
Mini-Environment System
Software (OS) version Windows NT

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the ADE AFS-3220?

The ADE AFS-3220 is wafer characterization metrology equipment.^[1]

What wafer size is the ADE AFS-3220 configured for?

The ADE AFS-3220 is currently configured for 300 mm wafers.^[1]

Not publicly documented

The following facts about the AFS-3220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AFS-3220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AFS-3220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AFS-3220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the AFS-3220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the AFS-3220 are on record.
Answerable by: an OEM parts catalog or a service engineer