Comparison ledger
ADE AFS-3220, Lam Research SEZ203, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFS-3220ADE | SEZ203Lam Research |
|---|---|---|
| OEM | ADE | Lam Research |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ADE AFS-3220 | Lam Research SEZ203 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Currently Configured for | 300mm[1] | — |
| Manufacturer | ADE[1] | LAM Research Corp.[3] |
| Model | AFS-3220[1] | SEZ203[2] |
| Equipment type | Wafer Characterization Metrology Equipment[1] | — |
| Configured wafer size | 300mm[1] | — |
| OEM manufacturing date | 2002[1] | — |
| Install date | 2002[1] | — |
| Date of last PM | 2017/4/13[1] | — |
| System status | Off-Line[1] | — |
| Handler type | BROOKS[1] | — |
| Robot type | BROOKS[1] | — |
| End-effector type | BROOKS[1] | — |
| Pre-aligner | Mini-Environment[1] | — |
| Control system | Windows NT[1] | — |
| Description | — | Spinprocessor Typ 10[2] |
| Year of Manufacture | — | 2004[2] |
| Condition | — | Poor[3] |
| CE Marked | — | YES[2] |
| Version | — | 200 mm[4] |
| Completeness | — | partial - Z80 missing[2] |