Comparison ledger
ADE AFS-3220, Lam Research TCP9400DFM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFS-3220ADE | TCP9400DFMLam Research |
|---|---|---|
| OEM | ADE | Lam Research |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ADE AFS-3220 | Lam Research TCP9400DFM |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Currently Configured for | 300mm[1] | — |
| Manufacturer | ADE[1] | Lam Research (listed as LAM / Lam)[3] |
| Model | AFS-3220[1] | — |
| Equipment type | Wafer Characterization Metrology Equipment[1] | Dry poly etcher[2] |
| Configured wafer size | 300mm[1] | — |
| OEM manufacturing date | 2002[1] | — |
| Install date | 2002[1] | — |
| Date of last PM | 2017/4/13[1] | — |
| System status | Off-Line[1] | — |
| Handler type | BROOKS[1] | — |
| Robot type | BROOKS[1] | — |
| End-effector type | BROOKS[1] | — |
| Pre-aligner | Mini-Environment[1] | — |
| Control system | Windows NT[1] | — |
| Dry | — | Poly Etcher[2] |
| Model / Part No. | — | TCP9400DFM[2] |
| Process | — | Poly etch[3] |