Comparison ledger
ADE AFS-3220, Nikon S-210, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFS-3220ADE | S-210Nikon |
|---|---|---|
| OEM | ADE | Nikon |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ADE AFS-3220 | Nikon S-210 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Currently Configured for | 300mm[1] | — |
| Manufacturer | ADE[1] | Nikon[2] |
| Model | AFS-3220[1] | S-210[2] |
| Equipment type | Wafer Characterization Metrology Equipment[1] | — |
| Configured wafer size | 300mm[1] | — |
| OEM manufacturing date | 2002[1] | — |
| Install date | 2002[1] | — |
| Date of last PM | 2017/4/13[1] | — |
| System status | Off-Line[1] | — |
| Handler type | BROOKS[1] | — |
| Robot type | BROOKS[1] | — |
| End-effector type | BROOKS[1] | — |
| Pre-aligner | Mini-Environment[1] | — |
| Control system | Windows NT[1] | — |
| Power | — | 200VAC 50/60Hz 3 Phase[2] |
| Condition | — | Used[2] |
| Year(s) | — | 2014[2] |
| Quantity | — | 1[2] |
| Location | — | EUROPE (Western and Northern)[2] |
| Status note | — | Still in the fab running wafers[2] |