Waferpedia

Comparison ledger

Cesar 136versus0010-03254 E Chuck

Advanced Energy Cesar 136, Applied Materials 0010-03254 E Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Cesar 136Advanced Energy
0010-03254 E ChuckApplied Materials
OEMAdvanced EnergyApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAdvanced Energy Cesar—
Specifications
Configuration50/60 Hz[1]—
Voltage230 V[1]—
Power600W[1]—
Equipment typeRF generator[2]—
Frequency13.56 MHz[3]—
Output power600 W[1]—
Current4.6 A[1]—
Mains frequency50/60 Hz[3]—
Input impedance50 Ohm[3]—
CoolingAir-cooled[3]—
Front panelActive front panel[3]—
Output connector7-16[3]—
Rack mounting19-inch rack mountable[3]—
CommunicationsAE Userport and RS-232 communication port[3]—
Part number61300047[3]—
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]idealvac.comidealvac.com
  4. [4]zhechentest.comzhechentest.com