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Advanced Energy

Cesar 136

Advanced Energy Cesar family
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The Advanced Energy Cesar 136 is an RF generator. The Advanced Energy Cesar 136 operates at 13.56 MHz. The Advanced Energy Cesar 136 is specified with output power up to 600 W.[1][2][3][4]

Cesar 136 — Inventory photo
Fig. 01Cesar 136Inventory photo[1]

What it is

The Advanced Energy Cesar 136 is an RF generator.[1]

What do the numbers mean?

Power & electrical8

50/60 Hz[1]
Accurate?
Voltage
230 V[1]
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13.56 MHz[1]
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Equipment type
RF generator[3]
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Frequency
13.56 MHz[2]
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Frequency
13.560 MHz[4]
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Voltage
187-253 VAC[2]
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Mains frequency
50/60 Hz[2]
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Configuration & options12

4.6A[1]
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Power
600W[1]
Accurate?
Output power
600 W[1]
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Output power
0 to 600 W[2]
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Current
4.6 A[1]
Accurate?
Input impedance
50 Ohm[2]
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Cooling
Air-cooled[2]
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Front panel
Active front panel[2]
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Output connector
7-16[2]
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Rack mounting
19-inch rack mountable[2]
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Communications
AE Userport and RS-232 communication port[2]
Accurate?
Part number
61300047[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Voltage230 V[1]
  • Configuration13.56 MHz[1]
  • Equipment typeRF generator[3]
  • Frequency13.56 MHz[2]
  • Frequency13.560 MHz[4]
  • Voltage187-253 VAC[2]
  • Mains frequency50/60 Hz[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the Advanced Energy Cesar 136?

The Advanced Energy Cesar 136 is an RF generator.[1][3]

What output frequency is specified for the Cesar 136?

The Cesar 136 is specified at 13.56 MHz.[1][3]

Not publicly documented

The following facts about the Cesar 136 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Cesar 136 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Cesar 136 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Cesar 136 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Cesar 136 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Cesar 136 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]idealvac.com — idealvac.comidealvac.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]zhechentest.com — zhechentest.comzhechentest.com
  5. [5]Inventory photo
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Last updated Oct 19, 2026.

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