Waferpedia

Comparison ledger

BlackMagic 6versus0010-21246 Part

Aixtron BlackMagic 6, Applied Materials 0010-21246 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMAixtronApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron BlackMagic 6—
Specifications
Wafer size6 inch[1]—
TypePECVD[2]—
Maximum temperature (top heater)900 °C[2]—
Maximum temperature (bottom heater)800 °C[2]—
Process pressure range4 to 6 mbar[2]—
Process gasesAr, N2[2]—
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]arxiv.orgarxiv.org