Aixtron
BlackMagic 6
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Aixtron BlackMagic 6 is a plasma-enhanced chemical vapor deposition (PECVD) system. The BlackMagic 6 processes 6-inch wafers. The BlackMagic 6 is used for carbon nanotube and graphene synthesis.[1]
How it works
In a typical graphene synthesis sequence using the BlackMagic 6, the chamber is first heated to a target temperature in an inert atmosphere, then a plasma is ignited with controlled power, pressure, and gas composition. The substrate is cooled after the deposition, and the samples are unloaded below threshold temperatures to avoid oxidation or contamination.[1]
Applications
Research applications demonstrated with the BlackMagic 6 include the study of sapphire surface termination effects on graphene crystallinity, using plasma etching to create hydrophilic or hydrophobic surfaces that influence the quality of the synthesized graphene layer.[1]
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
Gas & chemistry1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the BlackMagic 6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BlackMagic 6 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the BlackMagic 6 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the BlackMagic 6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the BlackMagic 6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the BlackMagic 6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]arxiv.org — arxiv.orgarxiv.org
- [2]Equipment inventory listing
Last updated Aug 14, 2026.
