Comparison ledger
AJA ATC 2036 E, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ATC 2036 EAJA | 0010-13622 RF Match forApplied Materials |
|---|---|---|
| OEM | AJA | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | 15-20” adjustable length from source to wafer | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | AJA ATC | Applied Materials 0010-13622 RF Match for |
| Cited variants | — | |
| Specifications | ||
| Wafer size | 15-20” adjustable length from source to wafer[2] | — |
| Configuration | Temescal Multu-Pocket Rotary E-Beam Source[2] | High Efficiency HE RF Match-Bias[4] |
| Chamber Front | Double hinged door with locking mechanism[2] | — |
| Model | ATC 2036 E[2] | 0010-13622[4] |
| Category | Deposition[3] | — |
| Source-to-wafer length | 15-20 inch adjustable[3] | — |
| Evaporation source | Temescal Multu-Pocket Rotary E-Beam Source[2] | — |
| Deposition controller | Quartz Crystal Deposition Controller[2] | — |
| Substrate holder | Water Cooled Substrate Holder[2] | — |
| Load-lock | Load-Lock[2] | — |
| Chamber dimensions | Nominal 36" high x 20" depth x 20" wide[2] | — |
| Chamber construction | Flat front; S/S vacuum chamber[2] | — |
| Vacuum gauge package | Vacuum Gauge Package with Cables[2] | — |
| Vacuum pumping | Brooks Cryo-Torr 8 straight cryo-pump with compressor (Model: 8200, water cooled); 16 cfm Pfeiffer (Adixen / ACP) dry, lobe type backing pump with fast acting inlet valve; AJA automated pumping system controlled and displayed via Touch Screen Controller[2] | — |
| Source type | 6 pocket rotary e-beam source[1] | — |
| Substrate heating | 1000°C substrate heating[1] | — |
| Substrate shutter | Programmable linear substrate shutter for wedge films[1] | — |
| Spare | 16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure[2] | — |
| Product Type | — | RF Match for PVD (Physical Vapor Deposition)[4] |
| Feature | — | High Efficiency HE RF Match-Bias[4] |
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