AJA

ATC 2036 E

Deposition 15-20” adjustable length from source to wafer AJA ATC family

Research Quality: 50% complete

ATC 2036 E — Inventory photo — Fig. 01ATC 2036 EInventory photo^[1]

Wafer size

15-20” adjustable length from source to wafer

Vacuum

Vacuum Gauge Package with Cables^[1]

What it is

The AJA ATC 2036 E is an electron beam evaporation system used for physical vapor deposition. The ATC 2036 E belongs to AJA's ATC-E series and is a high-vacuum box coater configuration.^[3]

How it works

The ATC 2036 E is configured with a Temescal multi-pocket rotary e-beam source, a quartz crystal deposition controller, vacuum gauges, pressure-control hardware, and vacuum valves. The ATC 2036 E also includes automated pumping control for pump down, cryo regeneration, and chamber vent.^[1]

Where it fits in the process flow

The ATC 2036 E includes a load-lock and pressure-control hardware, which supports transfer and chamber conditioning during deposition processing. The ATC 2036 E is also configured with vacuum pumping hardware, including a cryogenic pump package and a dry backing pump.^[1]

What do the numbers mean?

Vacuum & pumping10

Vacuum Gauge Package with Cables^[1]; Pressure Control/ Vacuum Valves^[1]; Power Distribution / Pump Control^[1]; S/S vacuum chamber^[1]; Cryo pump / Isolation valve (10" CF)^[1]; Vacuum gaugue (2.75")^[1]
Chamber construction: Flat front; S/S vacuum chamber^[1]
Vacuum gauge package: Vacuum Gauge Package with Cables^[1]
Vacuum pumping: Brooks Cryo-Torr 8 straight cryo-pump with compressor (Model: 8200, water cooled); 16 cfm Pfeiffer (Adixen / ACP) dry, lobe type backing pump with fast acting inlet valve; AJA automated pumping system controlled and displayed via Touch Screen Controller^[1]
Spare: 16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure^[1]

Wafer handling8

Wafer size: 15-20” adjustable length from source to wafer^[1]; Water Cooled Substrate Holder^[1]; Substrate holder (12' CF)^[1]; (2) 6" CF viewpoint with integrated shutters and minor for crucible viewing & load-lock transfer^[1]
Source-to-wafer length: 15-20 inch adjustable^[2]
Substrate holder: Water Cooled Substrate Holder^[1]
Substrate heating: 1000°C substrate heating^[3]
Substrate shutter: Programmable linear substrate shutter for wedge films^[3]

Control & software2

Quartz Crystal Deposition Controller^[1]
Deposition controller: Quartz Crystal Deposition Controller^[1]

Dimensions & facilities2

Nominal 36" high x 20" depth x 20" wide^[1]
Chamber dimensions: Nominal 36" high x 20" depth x 20" wide^[1]

Configuration & options13

Temescal Multu-Pocket Rotary E-Beam Source^[1]; Load-Lock^[1]; Pneumatic Controls^[1]; Main Deposition Chamber:^[1]; Flat front^[1]
Chamber Front: Double hinged door with locking mechanism^[1]; Ports on Chamber Body for Following Components:^[1]; Load-lock (10" CF)^[1]
Model: ATC 2036 E^[1]
Category: Deposition^[2]
Evaporation source: Temescal Multu-Pocket Rotary E-Beam Source^[1]
Load-lock: Load-Lock^[1]
Source type: 6 pocket rotary e-beam source^[3]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
ATC 2030-E HV	—	—	6 pocket rotary e-beam source with load-lock, water-cooled substrate holder, and front side radiant substrate heating.	web.archive.org^[3]
ATC 2036-E HV	—	—	6 pocket rotary e-beam source with 1000°C substrate heating, and programmable linear substrate shutter for wedge films.	web.archive.org^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationVacuum Gauge Package with Cables^[1]
ConfigurationPressure Control/ Vacuum Valves^[1]
ConfigurationPower Distribution / Pump Control^[1]
ConfigurationS/S vacuum chamber^[1]
ConfigurationCryo pump / Isolation valve (10" CF)^[1]
ConfigurationVacuum gaugue (2.75")^[1]
Chamber constructionFlat front; S/S vacuum chamber^[1]
Vacuum gauge packageVacuum Gauge Package with Cables^[1]
Vacuum pumpingBrooks Cryo-Torr 8 straight cryo-pump with compressor (Model: 8200, water cooled); 16 cfm Pfeiffer (Adixen / ACP) dry, lobe type backing pump with fast acting inlet valve; AJA automated pumping system controlled and displayed via Touch Screen Controller^[1]
Spare16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of deposition system is the ATC 2036 E?

The ATC 2036 E is an electron beam evaporation system for physical vapor deposition.^[3]

Not publicly documented

The following facts about the ATC 2036 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATC 2036 E are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ATC 2036 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATC 2036 E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATC 2036 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ATC 2036 E are on record.
Answerable by: an OEM parts catalog or a service engineer