AJA

ATC 2036 E

Deposition 15-20” adjustable length from source to wafer AJA ATC family

Research Quality: 30% complete

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ATC 2036 E — Inventory photo — Fig. 01ATC 2036 EInventory photo^[1]

Wafer size

15-20” adjustable length from source to wafer

Vacuum

Vacuum Gauge Package with Cables^[1]

What is it?

The AJA ATC 2036 E is an evaporator with a 15-20 inch adjustable source-to-wafer length.

What do the numbers mean?

Vacuum & pumping6

Vacuum Gauge Package with Cables^[1]

Accurate?

Pressure Control/ Vacuum Valves^[1]

Accurate?

Power Distribution / Pump Control^[1]

Accurate?

S/S vacuum chamber^[1]

Accurate?

Cryo pump / Isolation valve (10" CF)^[1]

Accurate?

Vacuum gaugue (2.75")^[1]

Accurate?

Wafer handling4

Wafer size: 15-20” adjustable length from source to wafer^[1]; Water Cooled Substrate Holder^[1]; Substrate holder (12' CF)^[1]; (2) 6" CF viewpoint with integrated shutters and minor for crucible viewing & load-lock transfer^[1]

Control & software1

Quartz Crystal Deposition Controller^[1]

Accurate?

Dimensions & facilities1

Nominal 36" high x 20" depth x 20" wide^[1]

Accurate?

Configuration & options8

Temescal Multu-Pocket Rotary E-Beam Source^[1]; Load-Lock^[1]; Pneumatic Controls^[1]; Main Deposition Chamber:^[1]; Flat front^[1]
Chamber Front: Double hinged door with locking mechanism^[1]; Ports on Chamber Body for Following Components:^[1]; Load-lock (10" CF)^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationVacuum Gauge Package with Cables^[1]
ConfigurationPressure Control/ Vacuum Valves^[1]
ConfigurationPower Distribution / Pump Control^[1]
ConfigurationS/S vacuum chamber^[1]
ConfigurationCryo pump / Isolation valve (10" CF)^[1]
ConfigurationVacuum gaugue (2.75")^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the ATC 2036 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATC 2036 E are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATC 2036 E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATC 2036 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATC 2036 E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATC 2036 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report