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Comparison ledger

0010-03254 E ChuckversusRV3

Applied Materials 0010-03254 E Chuck, Edwards RV3, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
RV3Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Edwards RV3
Specifications
Pump type—Standard two-stage rotary vane pump[1]
Model—RV3[1]
Design—Proven design[1]
Operating character—Quiet running and vibration free[1]
Gas ballast—Fitted with a gas ballast valve[1]
Included items—Electrical mains cable and on/off switch[1]
Configuration—Two-stage rotary vane[1]
Drive Type—Direct drive[1]
Gas Ballast Valve—Yes[1]
Features—Gas ballast valve, quiet running, vibration free[1]
Inlet port—NW25[1]
Outlet port—NW25[1]
Controls—Gas-ballast control and mode selector[1]
Motor drive—Directly driven by a single-phase or three-phase electric motor through a flexible motor-coupling[1]
Pumping speed at 60 Hz—2.6 CFM[2]
Ultimate pressure—1.5 x 10^-3 Torr[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]idealvac.comidealvac.com