Edwards
Plate 01Edwards RV3 Rotary Vane Vacuum Pump PN A65201903 w Oil Mist Filter EMF20
Plate 02Edwards RV3 A652-01-906 2 Stage Rotary Vane Vacuum Pump, 1Ph 115230V 5060Hz US, Serial #: 056277297
Plate 03Edwards RV3 Lab Vacuum Pump #hvacvacuum #labequipment
Plate 04Edwards RV3 Rotary Vane Vacuum Pump PN A65201903 w Oil Mist Filter EMF10
Plate 05EDWARDS RV3 RV 3 DUAL STAGE ROTARY VANE VACUUM PUMP A652 01 906 1PH 2 6CFM
Plate 06Edwards RV3 Dual Stage Rotary Vane Vacuum Pump 2.3 CFM 115v
Power
Electrical mains cable and on/off switch[1]
Vacuum
Standard two-stage rotary vane pump[1]
Gas delivery
Fitted with a gas ballast valve[1]
Process applications and technology nodes documented for this tool.
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
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The following facts about the RV3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RV3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RV3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RV3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RV3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RV3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Jul 29, 2026.