Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards XDS 10 Dry Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | XDS 10 Dry ScrollEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards XDS |
| Specifications | ||
| Voltage | — | 200-230 V[1] |
| Frequency | — | 50/60 Hz[1] |
| Current | — | 2.0-2.1 A[1] |
| OEM | — | Edwards[1] |
| Model | — | XDS 10[1] |
| Equipment name | — | XDS 10 Dry Scroll Pump[1] |
| Make | — | Edwards[1] |
| Type | — | Dry Scroll Pump[1] |
| Inlet flange | — | NW 25[2] |
| Exhaust flange | — | NW 25[2] |
| Ultimate vacuum | — | 6 x 10^-2 mbar[2] |
| Rotational speed | — | 1800 rpm[2] |
| Weight | — | 24 kg / 54 lbs[2] |
| Peak pumping speed | — | 6.5 cfm[3] |
| Motor | — | 1 phase[3] |
| Operating temperature range | — | 10 to 40 °C[3] |