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Edwards

XDS 10 Dry Scroll

Edwards XDS family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

XDS 10 Dry Scroll — Inventory photo
Fig. 01XDS 10 Dry ScrollInventory photo[1]

Power

200-230 V[1]

Vacuum

XDS 10 Dry Scroll Pump[1]

What it is

The Edwards XDS 10 Dry Scroll is a dry vacuum pump.[1]

What do the numbers mean?

Power & electrical2

Voltage
200-230 V[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Vacuum & pumping5

Equipment name
XDS 10 Dry Scroll Pump[1]
Accurate?
Type
Dry Scroll Pump[1]
Accurate?
Exhaust flange
NW 25[2]
Accurate?
Ultimate vacuum
6 x 10^-2 mbar[2]
Accurate?
Peak pumping speed
6.5 cfm[3]
Accurate?

Dimensions & facilities1

Weight
24 kg / 54 lbs[2]
Accurate?

Configuration & options8

Current
2.0-2.1 A[1]
Accurate?
OEM
Edwards[1]
Accurate?
Model
XDS 10[1]
Accurate?
Make
Edwards[1]
Accurate?
Inlet flange
NW 25[2]
Accurate?
Rotational speed
1800 rpm[2]
Accurate?
Motor
1 phase[3]
Accurate?
Operating temperature range
10 to 40 °C[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage200-230 V[1]
  • Frequency50/60 Hz[1]
  • Equipment nameXDS 10 Dry Scroll Pump[1]
  • TypeDry Scroll Pump[1]
  • Exhaust flangeNW 25[2]
  • Ultimate vacuum6 x 10^-2 mbar[2]
  • Peak pumping speed6.5 cfm[3]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

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Not publicly documented

Field notes

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Frequently asked questions

What is the Edwards XDS 10?

It is a dry scroll pump.[1]

What are the identified make and model?

The make is Edwards and the model is XDS 10.[1]

Not publicly documented

The following facts about the XDS 10 Dry Scroll are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS 10 Dry Scroll are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XDS 10 Dry Scroll are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XDS 10 Dry Scroll are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XDS 10 Dry Scroll are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XDS 10 Dry Scroll is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]ajvs.comajvs.com
  3. [3]avac.comavac.com
  4. [4]XACTIX Xetch System Manual — nanofab.utah.edunanofab.utah.edu
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Last updated Oct 20, 2026.

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