Comparison ledger
Applied Materials 0010-03254 E Chuck, Keysight 5517 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 5517 DKeysight |
|---|---|---|
| OEM | Applied Materials | Keysight |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Keysight 5517 |
| Cited variants | — |
|
| Specifications | ||
| Compatibe with ASML PAS 5500 Part Number | — | SERV 502 20876, 4022 454 71616, 4022 454 71615, 4022 454 71614[2] |
| Manufacturer | — | Keysight / Agilent[2] |
| Model | — | 5517 D[2] |
| Compatibility | — | ASML PAS 5500[2] |
| Part Numbers | — | SERV 502 20876, 4022 454 71616, 4022 454 71615, 4022 454 71614[2] |
| Laser type | — | Class II helium-neon laser source[1] |
| Wavelength | — | 633 nm[1] |
| Application | — | Precision dual-frequency interferometry[1] |
| Available laser beam diameter | — | 6 mm, 9 mm[1] |
| Maximum linear velocity | — | 1012 mm/s[1] |
| Reference frequency | — | 918 MHz[1] |
| Minimum output power | — | 3.4 to 4.0 μW[1] |
| Warm-up time | — | > 180 min[1] |
| Beam height | — | 79.5 mm[1] |
| Mean time between failures | — | > 50,000 hours typical[1] |