Keysight
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The Keysight / Agilent 5517 D is a laser compatible with ASML PAS 5500 lithography systems.[1]
Power
918 MHz[2]
Performance
Precision dual-frequency interferometry[2]
Optics
Class II helium-neon laser source[2]
The Keysight 5517D is part of the 5517 series of Class II helium-neon laser sources. The Keysight 5517D provides highly stable and accurate 633 nm wavelength light for precision dual-frequency interferometry. The 5517 series offers Zeeman split frequencies, beam size choices, power levels, and special options. The 5517D has a reference frequency of 3.4 to 4.0 MHz. The 5517D has minimum output power greater than 180 μW. The 5517D has a warm-up time of 90 min. The 5517D is available with 6 mm and 9 mm beam diameters. The 5517D has a maximum linear velocity of 1012 mm/s with 10897D optics and 918 mm/s with 10898D optics. The 5517 series has 2 ppb vacuum wavelength stability over 1 hour, 20 ppb over lifetime, standard wavelength accuracy of ± 0.1 ppm, optional calibrated accuracy of ± 0.02 ppm, and typical MTBF greater than 50,000 hours.[2]
The Keysight 5517 D is compatible with ASML PAS 5500 lithography systems.[1]
The Keysight 5517D is intended for precision dual-frequency interferometry.[2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 5517D | — | — | Laser head with 1012 mm/s maximum linear velocity, 918 MHz reference frequency, 3.4 to 4.0 μW minimum output power, > 180 min warm-up time, and 6 mm or 9 mm available laser beam diameter. | keysight.com[2] |
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The Keysight 5517 D is a laser.[1]
The Keysight 5517 D is compatible with ASML PAS 5500 lithography systems.[1]
The 5517D is part of the 5517 series of Class II helium-neon laser sources for precision dual-frequency interferometry.[2]
The 5517 series provides 633 nm wavelength light.[2]
The 5517D is available with 6 mm and 9 mm beam diameters.[2]
The 5517D has a warm-up time of 90 min.[2]
The following facts about the 5517 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5517 D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 5517 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5517 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5517 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5517 D are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 17, 2026.