Waferpedia

Comparison ledger

0010-03254 E ChuckversusEDC-650

Applied Materials 0010-03254 E Chuck, Laurell EDC-650, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
EDC-650Laurell
OEMApplied MaterialsLaurell
Category——
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Laurell EDC-650
Specifications
Model—EDC-650[1]
Equipment name in source—Laurell EDC-650 Spin Processor #2 (Primary Litho)[1]
Wafer handling—Unclamped pieces (mounted on carrier wafer), 100 mm round wafers, 150 mm round wafers, 100 mm × 100 mm square wafers[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca