Comparison ledger
Applied Materials 0010-03254 E Chuck, Veeco NT 9100 Surface Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Veeco |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Veeco NT 9100 Surface Profiler |
| Specifications | ||
| Measurement capability | — | Non-contact, three-dimensional, topography and film thickness[1] |
| Light source | — | Long-lifetime green and white LEDs[1] |
| Optical assembly | — | Dual LED illuminator; three-position FOV turret, closed-loop, 10mm scan[1] |
| Stages | — | Automated 100mm Z-axis; ±6° tip/tilt stage; 100mm XY manual stage, standard; 150mm XY auto stage, optional[1] |
| Vertical measurement range | — | 0.1nm to 10mm std. range[1] |
| Vertical resolution | — | <0.1nm RMS[1] |
| Repeatability | — | 0.05nm vertical repeatability[1] |
| Profiler footprint | — | 320mm W x 510mm D x 645mm H; 70kg excluding peripheral electronics and air table[1] |