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0010-03485 Magnet AssyversusQDP 80

Applied Materials 0010-03485 Magnet Assy, Edwards QDP 80, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
QDP 80Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyEdwards QDP 80
Cited variants—
  • QDP80 Drystar Pump (4 kW)[1]
  • QDP80 Drystar Pump (8 kW)[1]
Specifications
ConfigurationWP AL 300mm PVD[2](1) in good order[6]
OEMApplied Materials[2]—
Model0010-03485[2]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Qty—2[6]
Type—Dry Pump[7]
Pump type—four-stage, positive displacement rotary pump[1]
Inlet connection—ISO63[8]
Inlet connections—ISO63[1]
Outlet connection—NW40[8]
Outlet connections—NW40[1]
Motor rating—4 kW/6 kW[1]
Warm-up time to nominal performance—15 min[1]
Typical peak pumping speed—80 m3h-1 at 50 Hz; 96 m3h-1 at 60 Hz[1]
Typical ultimate vacuum without gas-ballast—3 x 10-2 mbar at 50 Hz; 3 x 10-2 mbar at 60 Hz[1]
Mass—202 kg[1]
Weight—202 Kg[9]
Exhaust—KF40[9]
Supply voltage—200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1]
Protection degree—IP44[1]
Continuous A-weighted sound pressure level (at 1 meter)—< 70 dB(A)[1]
Warm-up time—15 min[9]
Pumping speed—47 CFM (50Hz)[9]
Ultimate pressure—2.3 x 10-2 Torr (50Hz)[9]
Noise level measured at 1 m from the pump—< 70 dB(A)[9]
Ultimate vacuum—2.25 x 10-2 Torr (without gas ballast)[8]
Sources (9)Every fact above is drawn from these public sources
  1. [1]docs.chemtechsci.comdocs.chemtechsci.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]inventory listing
  7. [7]waferpedia.comwaferpedia.com
  8. [8]provac.comprovac.com
  9. [9]ecjent.comecjent.com