Comparison ledger
Applied Materials 0010-13622 RF Match for, Edwards E 306 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | E 306 AEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Edwards E 306 A |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | With a CT-200 cryopump and an Oil based Edwards roughing pump[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Tool type | — | Coater[3] |
| Vacuum & pumping | — | With a CT-200 cryopump and an oil based Edwards roughing pump[3] |
| Features | — | 2ea rotating shields that keep deposition and heat off of the belljar[2] |
| Known issue / consumable note | — | The thermal baskets need to be replaced as they are expendable items[2] |
| Included instrumentation | — | Ion gauge[3] |
| Category | — | Deposition[3] |
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