Edwards
E 306 A
The Edwards E 306 A is a coater. The Edwards E 306 A uses a CT-200 cryopump and an oil based Edwards roughing pump. The Edwards E 306 A includes an ion gauge.[1][2]
What it is
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Thermal baskets need to be replaced as they are expendable items.
What do the numbers mean?
Vacuum & pumping3
- With a CT-200 cryopump and an Oil based Edwards roughing pump[1]
Configuration & options21
- Features:[1]
- 2ea rotating ’shields’ that keep deposition and heat off of the belljar[1]
- A 4-pocket eGun and both a fixed shutter and a rotary shutter[1]
- The stage contains tapped holes so one may mount samples to it using screws and clips[1]
- The crystal monitor is very close to the stage[1]
- The thermal baskets all need to be replaced as they are expendable items[1]
- The unit includes an ion gauge[1]
- Features
- The stage contains tapped holes so one may mount samples to it using screws and clips[1]
- Known issue / consumable note
- The thermal baskets need to be replaced as they are expendable items[1]
- Known issue / consumable note
- Thermal baskets need to be replaced because they are expendable items[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does a deposition system do?General reference — not yet source-verified
A deposition system forms a thin film on a substrate by transferring material from a source to the substrate surface under controlled conditions, usually in vacuum. The purpose is to create a layer with a specific electrical, optical, mechanical, or chemical function.
What kinds of materials can machines of this class deposit?General reference — not yet source-verified
Machines of this class can be used for a wide range of thin-film materials, including metals, dielectrics, semiconducting materials, and compound coatings, provided the chosen deposition method and source arrangement are suitable for the material system.
What process outcomes matter most for this class of equipment?General reference — not yet source-verified
Key outcomes for machines of this class are film uniformity, adhesion, composition control, cleanliness, repeatability, and the ability to achieve the intended electrical or optical behavior of the deposited layer.
Not publicly documented
The following facts about the E 306 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 306 A are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 306 A are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 306 A are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the E 306 A is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 306 A are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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