Waferpedia

Edwards

E 306 A

Edwards E 306 A family
Research Quality: 20% complete
E 306 A — Inventory photo
Fig. 01E 306 AInventory photo[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Thermal baskets need to be replaced as they are expendable items.

What do the numbers mean?

Vacuum & pumping1

With a CT-200 cryopump and an Oil based Edwards roughing pump[1]
Accurate?

Configuration & options7

Features:[1]
Accurate?
2ea rotating ’shields’ that keep deposition and heat off of the belljar[1]
Accurate?
A 4-pocket eGun and both a fixed shutter and a rotary shutter[1]
Accurate?
The stage contains tapped holes so one may mount samples to it using screws and clips[1]
Accurate?
The crystal monitor is very close to the stage[1]
Accurate?
The thermal baskets all need to be replaced as they are expendable items[1]
Accurate?
The unit includes an ion gauge[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationWith a CT-200 cryopump and an Oil based Edwards roughing pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the E 306 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 306 A are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the E 306 A are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the E 306 A are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the E 306 A is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the E 306 A are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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