Waferpedia

Comparison ledger

0010-13622 RF Match forversusConcept Three

Applied Materials 0010-13622 RF Match for, Lam Research Concept Three, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Concept ThreeLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forLam Research Concept Three
Cited variants—
  • Concept Three Speed[1]
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[2]Speed 999[3]
Model0010-13622[2]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[2]—
FeatureHigh Efficiency HE RF Match-Bias[2]—
Equipment type—CVD (Chemical Vapor Deposition) deposition system[4]
Category—Deposition[1]
Variant—Concept Three Speed is a CVD deposition system for 12-inch wafers[1]
Wafer size—12-inch wafers[1]
Speed—999[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com