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Tool family

Lam Research Concept Three

Lam ResearchDeposition3 entries
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Models in this family

  1. Concept Three

    Lam / Novellus Concept Three is a CVD (Chemical Vapor Deposition) deposition system.

  2. Concept Three Altus
  3. Concept Three Speed

    Lam / Novellus Concept Three Speed is a CVD deposition system for 12-inch wafers.

All entries

  1. Concept ThreeLam Research

    Lam / Novellus Concept Three is a CVD (Chemical Vapor Deposition) deposition system.

    CategoryDeposition
    1 spec
  2. Concept Three AltusLam Research
    CategoryEtch
    2 specs
  3. Concept Three SpeedLam Research

    Lam / Novellus Concept Three Speed is a CVD deposition system for 12-inch wafers.

    CategoryDeposition
    20 specs