Lam Research Concept Three

Models in this family

1. Concept Three

   Lam / Novellus Concept Three is a CVD (Chemical Vapor Deposition) deposition system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Concept Three Speed	—	—	CVD deposition system for 12-inch wafers	waferpedia.com[1]

2. 

   Concept Three Altus

   The Lam Research Concept Three Altus is an etch tool.

3. 

   Concept Three Speed

   Lam / Novellus Concept Three Speed is a CVD deposition system for 12-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Triple Speed NF	—	2008	Triple Speed NF configuration with WTS IMM handler, modules at ports 2-4, Brooks ATR 8 front-end robot, and Brooks Mag 7 TM robot.	Equipment inventory listing[2]

Sources