Comparison ledger
Applied Materials 0010-13622 RF Match for, Lam Research Gasonics Vector Extreme, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Gasonics Vector ExtremeLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Lam Research Gasonics Vector |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Process Module Options:[2] |
| Model | 0010-13622[1] | Vector Extreme[2] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Software Version & Build | — | V5.2[2] |
| Label Kit | — | English[2] |
| Interconnect Cable Length | — | 75 ft[2] |
| Non-Standard System Features | — | System NSR 1, System NSR 2[2] |
| Primary Process | — | SION[2] |
| Secondary Process | — | ARC, USG[2] |
| RCP Generator | — | AX 7645[2] |
| RF Config | — | SIRF[2] |
| Top Plate Tubing Size | — | 1/4 in[2] |
| Chamber Hardware | — | Nickel Plated Standard[2] |
| Chamber Gate Valve | — | Chemraz[2] |
| HF Generator | — | Apex 3 KW[2] |
| LF Generator | — | PDX 2500[2] |
| RF Sensor Board | — | Standard[2] |
| IREPD Controller | — | MKS 20704 A 28818, RMU[2] |
| Software Version and Build | — | V5.2[3] |
| Make | — | Lam / Novellus / Gasonics[2] |
| Process type | — | Plasma-Enhanced Chemical Vapor Deposition (PECVD)[2] |
| Wafer size | — | 12 inch[2] |
| Secondary processes | — | ARC, USG[3] |
| RPC generator | — | AX 7645[3] |
| RF configuration | — | SIRF[3] |
| Load lock pump | — | Kashiyama NV60[3] |
| Control era | — | Windows XP[3] |
| O-Rings | — | Chemraz[2] |
| Process Manometer | — | Heated[2] |
| View Ports | — | 5 Viewpoints[2] |
| Pedestal Options | — | Classic conditioned 300 mm[2] |
| Minimum Contact Area (MCA) | — | Pin & Ball[2] |
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