Lam Research

Gasonics Vector Extreme

Deposition Lam Research Gasonics Vector family

Research Quality: 30% complete

Gasonics Vector Extreme — Inventory photo — Fig. 01Gasonics Vector ExtremeInventory photo^[1]

What is it?

The Lam / Novellus / Gasonics Vector Extreme is a PECVD system described with 12-inch wafer size and a range of process, gas box, and front-end options.

What do the numbers mean?

Power & electrical5

RCP Generator: AX 7645^[2]
RF Config: SIRF^[2]
HF Generator: Apex 3 KW^[2]
LF Generator: PDX 2500^[2]
RF Sensor Board: Standard^[2]

Control & software3

Software Version & Build: V5.2^[2]
IREPD Controller: MKS 20704 A 28818, RMU^[2]
Software Version and Build: V5.2^[1]

Configuration & options16

Label Kit: English^[2]
Interconnect Cable Length: 75 ft^[2]
Non-Standard System Features: System NSR 1, System NSR 2^[2]; Process Module Options:^[2]
Primary Process: SION^[2]
Secondary Process: ARC, USG^[2]; Liquid Delivery System:^[2]; No ILDS Options^[2]; Heated Top Plate^[2]
Top Plate Tubing Size: 1/4 in^[2]
Chamber Hardware: Nickel Plated Standard^[2]
Chamber Gate Valve: Chemraz^[2]; Hot Chamber covers^[2]
Interconnect Cable Length: 75 Feet^[1]; Process Module Options^[1]; Liquid Delivery System^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RCP GeneratorAX 7645^[2]
RF ConfigSIRF^[2]
HF GeneratorApex 3 KW^[2]
LF GeneratorPDX 2500^[2]
RF Sensor BoardStandard^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Gasonics Vector Extreme are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Vector Extreme are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Vector Extreme are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Vector Extreme are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Vector Extreme are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Vector Extreme is not on record.
Answerable by: an OEM datasheet or a fab qualification report