Comparison ledger
Applied Materials 0010-13622 RF Match for, Leybold Helios 800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Helios 800Leybold |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Leybold Helios 800 |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | 1 x Transfer module w/ vacuum robot incl. Gate valve[2] |
| Model | 0010-13622[1] | Helios 800[2] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Line voltage | — | 3AC400V+/-10%[2] |
| Line frequency | — | 50 Hz[2] |
| Manufacturer | — | Leybold[2] |
| Category | — | Deposition[3] |
| Type | — | Sputter coater[2] |
| Transfer module | — | 1 x Transfer module w/ vacuum robot incl. Gate valve[2] |
| Load lock modules | — | 3 x Load lock modules w/ gate valve & cassette for 12 substrate carriers[2] |
| Vacuum equipment | — | 1 set vacuum equipment including dry pre-vacuum pump unit, turbo molecular pump, vacuum gauges, vacuum pipes & valves[2] |
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