Leybold
Helios 800
Leybold Helios 800 is a sputter coater. Leybold Helios 800 includes a transfer module with a vacuum robot and gate valve. Leybold Helios 800 includes three load lock modules with gate valves and cassettes for 12 substrate carriers.[1][2]
What it is
General reference — not yet source-verifiedSputter coaters are vacuum deposition tools used to form thin films on substrate surfaces. Sputter coaters are commonly used when a process flow requires controlled physical deposition of material from a target onto a substrate.
How it works
The Leybold Helios 800 includes one transfer module with a vacuum robot and gate valve. The Leybold Helios 800 includes three load lock modules with gate valves and cassettes for 12 substrate carriers. The Leybold Helios 800 includes one set of vacuum equipment comprising a dry pre-vacuum pump unit, a turbo molecular pump, vacuum gauges, and vacuum pipes and valves.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedDeposition tools of this class are used after substrate preparation and before later patterning, etch, lift-off, anneal, or integration steps, depending on the device flow. Sputter coaters are commonly placed where a process requires a conductive, optical, barrier, adhesion, or other functional thin film before subsequent module processing.
Applications
The HELIOS 800 tool was qualified for filter-on-chip CMOS sensors in work announced by imec and Buhler Leybold Optics.[3]
What do the numbers mean?
Power & electrical2
Vacuum & pumping8
- 1 x Transfer module w/ vacuum robot incl. Gate valve[1]
- 1 set vacuum equipment including:[1]
- dry pre-vacuum pump unit[1]
- turbo molecular pump[1]
- vacuum gauges[1]
- vacuum pipes & valves[1]
- Vacuum equipment
- 1 set vacuum equipment including dry pre-vacuum pump unit, turbo molecular pump, vacuum gauges, vacuum pipes & valves[1]
Wafer handling2
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Line voltage3AC400V+/-10%[1]
- Line frequency50 Hz[1]
- Configuration1 x Transfer module w/ vacuum robot incl. Gate valve[1]
- Configuration1 set vacuum equipment including:[1]
- Configurationdry pre-vacuum pump unit[1]
- Configurationturbo molecular pump[1]
- Configurationvacuum gauges[1]
- Configurationvacuum pipes & valves[1]
- Transfer module1 x Transfer module w/ vacuum robot incl. Gate valve[1]
- Vacuum equipment1 set vacuum equipment including dry pre-vacuum pump unit, turbo molecular pump, vacuum gauges, vacuum pipes & valves[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Helios 800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Helios 800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Helios 800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Helios 800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Helios 800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Helios 800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Imec, Buhler Leybold Qualify HELIOS 800 Tool for Filter-on-Chip CMOS Sensors — semiconductorpackagingnews.comsemiconductorpackagingnews.com
Last updated Oct 16, 2026.
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