Leybold
Helios 800
What is it?
What do the numbers mean?
Power & electrical2
Vacuum & pumping6
Wafer handling1
- 3 x Load lock modules w/ gate valve & cassette for 12 substrate carriers[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Line voltage3AC400V+/-10%[1]
- Line frequency50 Hz[1]
- Configuration1 x Transfer module w/ vacuum robot incl. Gate valve[1]
- Configuration1 set vacuum equipment including:[1]
- Configurationdry pre-vacuum pump unit[1]
- Configurationturbo molecular pump[1]
- Configurationvacuum gauges[1]
- Configurationvacuum pipes & valves[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Helios 800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Helios 800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Helios 800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Helios 800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Helios 800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Helios 800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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